发明授权
- 专利标题： Near field optical probe having an internal near field generating and detecting device, and manufacturing method thereof
- 专利标题（中）： 具有内部近场产生和检测装置的近场光学探针及其制造方法
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申请号： US10307438申请日： 2002-12-02
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公开(公告)号： US06995350B2公开(公告)日： 2006-02-07
- 发明人: Shunsuke Fujita , Junichi Takahashi , Motoichi Ohtsu , Motonobu Kourogi
- 申请人： Shunsuke Fujita , Junichi Takahashi , Motoichi Ohtsu , Motonobu Kourogi
- 申请人地址： JP Tokyo JP Kawasaki
- 专利权人： Ricoh Company, Ltd.,Kanagawa Academy of Science and Technology
- 当前专利权人： Ricoh Company, Ltd.,Kanagawa Academy of Science and Technology
- 当前专利权人地址： JP Tokyo JP Kawasaki
- 代理机构： Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- 优先权： JP10-334505 19981125; JP10-334506 19981125; JP11-151923 19990531
- 主分类号： H01J3/14
- IPC分类号： H01J3/14
摘要：
In a near field optical probe, a through hole having an aperture is provided in a semiconductor photodetector including at least a first-conductive-type high-concentration impurity layer, a first-conductive-type low-concentration impurity layer and a second-conductivity impurity-introduced region.
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