发明授权
US06995912B2 Condensing lens, optically-multiplexed-laser-light source, and exposure system 失效
冷凝透镜,光复用激光光源和曝光系统

Condensing lens, optically-multiplexed-laser-light source, and exposure system
摘要:
A condensing lens is integrally formed with collimator-lens portions which respectively collimate light beams and a condensing lens portion which makes the collimated light beams converge at a common point. In addition, an optically-multiplexed-laser-light source is constituted by semiconductor lasers, a multimode optical fiber, and the above condensing lens, where the collimator-lens portions in the condensing lens are respectively arranged in correspondence with the semiconductor lasers, and the condensing lens portion couples the light beams collimated by the collimator-lens portions, to the multimode optical fiber.
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