Invention Grant
- Patent Title: Optical recording medium with phase transition layer and method of manufacturing the optical recording medium
- Patent Title (中): 具有相变层的光记录介质和制造光记录介质的方法
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Application No.: US10441122Application Date: 2003-05-20
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Publication No.: US06998162B2Publication Date: 2006-02-14
- Inventor: In-kyeong Yoo , Soo-hwan Jeong , In-sook Kim
- Applicant: In-kyeong Yoo , Soo-hwan Jeong , In-sook Kim
- Applicant Address: KR Suwon
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon
- Agency: Burns, Doane, Swecker & Mathis, LLP
- Priority: KR10-2002-0071610 20021118
- Main IPC: B32B3/02
- IPC: B32B3/02

Abstract:
An optical recording medium having a phase transition material film and a method of manufacturing the optical recording medium are provided. In the method, first, a phase transition material film, a sacrificial film, and a metal film are sequentially stacked on a substrate. Next, the metal film is anodized to form a metal oxide film having a plurality of holes, and portions of the sacrificial film exposed through the holes are anode-oxidized to form oxide films. Thereafter, the phase transition material film is patterned by removing the metal oxide film and by etching the sacrificial film and the phase transition material film using the oxide films as a mask. Then, the oxide films are removed from the sacrificial film, and an upper insulation film, a reflection film, and a protection film are deposited on the upper surface of the patterned phase transition material film. The optical recording medium can be simply manufactured by using a self-alignment method and can have a highly-integrated large-capacity memory.
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