发明授权
- 专利标题: Method for evaluating piezoelectric fields
- 专利标题(中): 压电场评估方法
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申请号: US10768163申请日: 2004-02-02
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公开(公告)号: US06998615B2公开(公告)日: 2006-02-14
- 发明人: Hideo Takeuchi , Yoshitsugu Yamamoto , Takahide Ishikawa
- 申请人: Hideo Takeuchi , Yoshitsugu Yamamoto , Takahide Ishikawa
- 申请人地址: JP Tokyo
- 专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Leydig, Voit & Mayer, Ltd.
- 优先权: JP2003-033306 20030212
- 主分类号: G01R29/22
- IPC分类号: G01R29/22
摘要:
In a method of evaluating a piezoelectric field, non-destructive spectrometry of piezoelectric fields is performed in a semiconductor heterojunction using a technique different from PR spectroscopy. In the method, at first, first and second absorption spectra are measured by irradiating the sample with infrared light at first and second angles, respectively. Then, a peak position of an absorption band having incident-angle dependent intensity is specified, based on the first and second absorption spectra. Thus, the piezoelectric field strength is obtained using a relationship between the piezoelectric field and an electron energy level corresponding to the peak position.
公开/授权文献
- US20040155194A1 Method for evaluating piezoelectric fields 公开/授权日:2004-08-12
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