发明授权
US06998758B2 Deformable MEMS mirror with membrane actuated by application of torque
有权
可变形的MEMS镜,通过施加扭矩由膜致动
- 专利标题: Deformable MEMS mirror with membrane actuated by application of torque
- 专利标题(中): 可变形的MEMS镜,通过施加扭矩由膜致动
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申请号: US10455082申请日: 2003-06-05
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公开(公告)号: US06998758B2公开(公告)日: 2006-02-14
- 发明人: Vladimir A. Aksyuk , Omar D. Lopez , Flavio Pardo , Maria E. Simon
- 申请人: Vladimir A. Aksyuk , Omar D. Lopez , Flavio Pardo , Maria E. Simon
- 申请人地址: US NJ Murray Hill
- 专利权人: Lucent Technologies Inc.
- 当前专利权人: Lucent Technologies Inc.
- 当前专利权人地址: US NJ Murray Hill
- 主分类号: H02N1/00
- IPC分类号: H02N1/00 ; G02B26/10 ; G02B26/08
摘要:
A MEMS device having a deformable mirror. In a representative embodiment, the MEMS device includes a deformable membrane supporting a plurality of light-reflecting segments that form the deformable mirror. One or more actuators, at least one of which is configured to apply torque to a side of the membrane, are used to deform the membrane. Membrane deformation causes the segments to change orientation and thereby change the shape of the minor. A representative MEMS device of the invention enables segment displacements in two directions and thereby realizes effective mirror curvature values in the range from about −2 mm−1 to about +2 mm−1.
公开/授权文献
- US20040245888A1 Deformable MEMS mirror 公开/授权日:2004-12-09
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