发明授权
US06998758B2 Deformable MEMS mirror with membrane actuated by application of torque 有权
可变形的MEMS镜,通过施加扭矩由膜致动

Deformable MEMS mirror with membrane actuated by application of torque
摘要:
A MEMS device having a deformable mirror. In a representative embodiment, the MEMS device includes a deformable membrane supporting a plurality of light-reflecting segments that form the deformable mirror. One or more actuators, at least one of which is configured to apply torque to a side of the membrane, are used to deform the membrane. Membrane deformation causes the segments to change orientation and thereby change the shape of the minor. A representative MEMS device of the invention enables segment displacements in two directions and thereby realizes effective mirror curvature values in the range from about −2 mm−1 to about +2 mm−1.
公开/授权文献
信息查询
0/0