Invention Grant
- Patent Title: Method a quartz sensor
- Patent Title (中): 方法石英传感器
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Application No.: US10828142Application Date: 2004-04-20
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Publication No.: US07000298B2Publication Date: 2006-02-21
- Inventor: James D. Cook , Cornel P. Cobianu , Vlad Buiculescu , Ioan Pavelescu , Brian D. Speldrich , James Z. Liu , Brian J. Marsh
- Applicant: James D. Cook , Cornel P. Cobianu , Vlad Buiculescu , Ioan Pavelescu , Brian D. Speldrich , James Z. Liu , Brian J. Marsh
- Applicant Address: US NJ Morristown
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morristown
- Agent Kris T. Fredrick; Kermit D. Lopez; Luis M. Ortiz
- Main IPC: H01G7/00
- IPC: H01G7/00 ; C23F1/00

Abstract:
A quartz sensor method and system are disclosed in which a plurality of SAW sensing resonators can be mechanically simulated for implementation upon a quartz wafer substrate. The quartz wafer substrate can thereafter be appropriately etched to produce a quartz diaphragm from the quartz wafer substrate. A plurality of SAW sensing resonators (e.g., pressure, reference and/or temperature SAW resonators) can then be located upon the quartz wafer substrate, which is based upon the previously mechanically simulated for implementation upon the substrate to thereby produce a quartz sensor package from the quartz wafer substrate.
Public/Granted literature
- US20050231067A1 Pressure sensor methods and systems Public/Granted day:2005-10-20
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