发明授权
- 专利标题: Reynolds number correction function for mass flow rate sensor
- 专利标题(中): 质量流量传感器的雷诺数校正功能
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申请号: US10987719申请日: 2004-11-12
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公开(公告)号: US07000463B1公开(公告)日: 2006-02-21
- 发明人: Ali Shajii , Paul Meneghini
- 申请人: Ali Shajii , Paul Meneghini
- 申请人地址: US MA Wilmington
- 专利权人: MKS Instruments, Inc.
- 当前专利权人: MKS Instruments, Inc.
- 当前专利权人地址: US MA Wilmington
- 代理机构: McDermott Will & Emery LLP
- 主分类号: G01F1/68
- IPC分类号: G01F1/68
摘要:
A mass flow rate sensor uses a Reynolds number correction function to compensate for errors in a bypass ratio of the sensor for all gases, based on the fact that all bypass errors are functions of Reynolds number. The sensor includes a sensor tube and a bypass tube dividing flow, wherein a bypass ratio of the sensor equals a total flow rate through the sensor divided by a flow rate through just the sensor tube. Heater elements heat an upstream portion and a downstream portion of the sensor tube, and a circuit is connected to the heater elements for producing a voltage based upon a difference in resistance between the heater elements. The voltage is calibrated based on known flow rates of a reference gas, and the flow rate through the sensor is based upon the calibrated voltage multiplied by a multi-gas correction function and a Reynolds number correction function.
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