A sheet supply section disposed along a transport way of a substrate feeds a sheet wound in a roll shape. A sheet cutting section cuts a sealing sheet to be set on the substrate from a fed portion of the sheet. A sheet set section including a transfer head of a vacuum suction type with a plurality of suction holes disposed therein reciprocates/moves the transfer head over a sheet receiving position in the sheet cutting section and a sheet covering position in the transport way. The sheet set section lowers the transfer head in the sheet receiving position, raises the transfer head at the sheet covering position. The transfer head attracts the sheet at the sheet-receiving position and does not attract the sheet at the sheet covering position the sheet covers the substrate.