- 专利标题: Spinel-structured metal oxide on a substrate and method of making same by molecular beam epitaxy
-
申请号: US10653035申请日: 2003-08-29
-
公开(公告)号: US07001459B2公开(公告)日: 2006-02-21
- 发明人: Scott A. Chambers
- 申请人: Scott A. Chambers
- 申请人地址: US WA Richland
- 专利权人: Battelle Memorial Institute
- 当前专利权人: Battelle Memorial Institute
- 当前专利权人地址: US WA Richland
- 代理机构: Klarquist Sparkman, LLP
- 主分类号: C30B25/02
- IPC分类号: C30B25/02
摘要:
A method of making a spinel-structured metal oxide on a substrate by molecular beam epitaxy, comprising the step of supplying activated oxygen, a first metal atom flux, and at least one other metal atom flux to the surface of the substrate, wherein the metal atom fluxes are individually controlled at the substrate so as to grow the spinel-structured metal oxide on the substrate and the metal oxide is substantially in a thermodynamically stable state during the growth of the metal oxide. A particular embodiment of the present invention encompasses a method of making a spinel-structured binary ferrite, including Co ferrite, without the need of a post-growth anneal to obtain the desired equilibrium state.
公开/授权文献
信息查询
IPC分类: