发明授权
- 专利标题: Electrode manufacturing method
- 专利标题(中): 电极制造方法
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申请号: US10902301申请日: 2004-07-30
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公开(公告)号: US07001787B2公开(公告)日: 2006-02-21
- 发明人: Tetsufumi Tanamoto , Satoshi Saito , Shinobu Fujita
- 申请人: Tetsufumi Tanamoto , Satoshi Saito , Shinobu Fujita
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Foley & Lardner LLP
- 优先权: JP2003-285347 20030801
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
An electrode manufacturing method comprises: forming plural protruding portions on a surface of a substrate; introducing first particles having a size that changes according to heat, light, or a first solvent between said plural protruding portions; changing the size of the first particles by applying heat, light, or the first solvent to said first particles; and depositing an electrode material onto the surface of said substrate.
公开/授权文献
- US20050026411A1 Electrode manufacturing method 公开/授权日:2005-02-03
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