• Patent Title: Discharge laser with porous insulating layer covering anode discharge surface
  • Application No.: US10684016
    Application Date: 2003-10-10
  • Publication No.: US07003012B2
    Publication Date: 2006-02-21
  • Inventor: Richard G. Morton
  • Applicant: Richard G. Morton
  • Applicant Address: US CA San Diego
  • Assignee: Cymer, Inc.
  • Current Assignee: Cymer, Inc.
  • Current Assignee Address: US CA San Diego
  • Agent William Cray
  • Main IPC: H01S3/223
  • IPC: H01S3/223 H01S3/097
Discharge laser with porous insulating layer covering anode discharge surface
Abstract:
A gas discharge laser having an elongated cathode and an elongated anode with a porous insulating layer covering the anode discharge surface. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 5 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges. In preferred embodiments at least a portion of the anode is comprised of lead, and fluorine ion sputtering of the anode surface creates the insulating layer (over the discharge surface of the anode) comprised in large part of lead fluoride. In a particular preferred embodiment the anode is fabricated in two parts, a first part having the general shape of a prior art anode with a trench shaped cavity at the top and a second part comprised of lead rich brass and disposed in the trench shape cavity.
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