- 专利标题: CMP systems and methods utilizing amine-containing polymers
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申请号: US10051241申请日: 2002-01-18
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公开(公告)号: US07004819B2公开(公告)日: 2006-02-28
- 发明人: Kevin J. Moeggenborg , Isaac K. Cherian , Vlasta Brusic
- 申请人: Kevin J. Moeggenborg , Isaac K. Cherian , Vlasta Brusic
- 申请人地址: US IL Aurora
- 专利权人: Cabot Microelectronics Corporation
- 当前专利权人: Cabot Microelectronics Corporation
- 当前专利权人地址: US IL Aurora
- 代理商 Caryn Borg-Breen
- 主分类号: B24B7/22
- IPC分类号: B24B7/22
摘要:
The invention provides a chemical-mechanical polishing system and method comprising a liquid carrier, a polishing pad and/or an abrasive, and at least one amine-containing polymer, wherein the amine-containing polymer has about 5 or more sequential atoms separating the nitrogen atoms of the amino functional groups or is a block copolymer with at least one polymer block comprising one or more amine functional groups and at least one polymer block not comprising any amine functional groups.
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