发明授权
- 专利标题: Method for manufacturing probes of a probe card
- 专利标题(中): 探针卡探头的制造方法
-
申请号: US10223350申请日: 2002-08-20
-
公开(公告)号: US07005054B2公开(公告)日: 2006-02-28
- 发明人: S. J. Cheng , An-Hong Liu , Yeong-Her Wang , Yuan-Ping Tseng , Y. J. Lee
- 申请人: S. J. Cheng , An-Hong Liu , Yeong-Her Wang , Yuan-Ping Tseng , Y. J. Lee
- 申请人地址: BM Hamilton TW Hsinchu
- 专利权人: Chipmos Technologies (Bermuda) Ltd.,Chipmos Technologies Inc.
- 当前专利权人: Chipmos Technologies (Bermuda) Ltd.,Chipmos Technologies Inc.
- 当前专利权人地址: BM Hamilton TW Hsinchu
- 代理机构: Dennison, Schultz, Dougherty & MacDonald
- 主分类号: C25D5/02
- IPC分类号: C25D5/02 ; C25D5/54 ; C25D5/56 ; H05K3/00
摘要:
A method to make probes of a probe card includes providing a blocking plate on an electroplating tank. The blocking plate has a plurality of openings according to the layout of contact pads on a probe head. There are bumps on the contact pads of the probe head. Continuous electroplating process can be executed after bumps (contact pads) contact electroplating solution in the electroplating tank through the openings of the blocking plate. By continuously moving the probe head according to the desired shape of probes, probes were formed by electroplating. These probes can be made into different shapes with good uniformity in elasticity and heights to increase the quality of electrical contact during wafer probing. Moreover, the process lead time and fabrication cost are saved.
公开/授权文献
- US20040035706A1 Method for manufacturing probes of a probe card 公开/授权日:2004-02-26
信息查询