发明授权
- 专利标题： Method of manufacturing inorganic nanotube
- 专利标题（中）： 制造无机纳米管的方法
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申请号： US10464860申请日： 2003-06-19
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公开(公告)号： US07005391B2公开(公告)日： 2006-02-28
- 发明人: Yo-sep Min , Eun-ju Bae , Won-bong Choi , Young-jin Cho , Jung-hyun Lee
- 申请人： Yo-sep Min , Eun-ju Bae , Won-bong Choi , Young-jin Cho , Jung-hyun Lee
- 申请人地址： KR Kyungki-do
- 专利权人： Samsung Electronics Co., Ltd.
- 当前专利权人： Samsung Electronics Co., Ltd.
- 当前专利权人地址： KR Kyungki-do
- 代理机构： Lee & Morse P.C.
- 优先权： KR2002-0034293 20020619
- 主分类号： H01L21/31
- IPC分类号： H01L21/31
摘要：
A method of manufacturing an inorganic nanotube using a carbon nanotube (CNT) as a template, includes preparing a template on which a CNT or a CNT array is formed, forming an inorganic thin film on the CNT by depositing an inorganic material on the template using atomic layer deposition (ALD), and removing the CNT to obtain an inorganic nanotube or an inorganic nanotube array, respectively.
公开/授权文献
- US20050202684A1 METHOD OF MANUFACTURING INORGANIC NANOTUBE 公开/授权日：2005-09-15