发明授权
US07008301B1 Polishing uniformity via pad conditioning 失效
抛光均匀性通过垫调节

Polishing uniformity via pad conditioning
摘要:
According to an example embodiment, the present invention is directed to a CMP apparatus having a polishing table, a wafer carrier adapted to carry a wafer on a pad, and a conditioning wheel. If the pad is being polished in a center-fast or center-slow manner, the conditioning wheel is used to condition the pad and to improve the center-fast or center-slow condition. Benefits of using this embodiment include improved wafer quality, improved pad life, a reduction in defective wafers, and faster production.
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