发明授权
- 专利标题: Polishing uniformity via pad conditioning
- 专利标题(中): 抛光均匀性通过垫调节
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申请号: US09383876申请日: 1999-08-26
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公开(公告)号: US07008301B1公开(公告)日: 2006-03-07
- 发明人: Christopher H. Raeder
- 申请人: Christopher H. Raeder
- 申请人地址: US CA Sunnyvale
- 专利权人: Advanced Micro Devices, Inc.
- 当前专利权人: Advanced Micro Devices, Inc.
- 当前专利权人地址: US CA Sunnyvale
- 代理机构: Crawford Maunu PLLC
- 主分类号: B24B1/00
- IPC分类号: B24B1/00
摘要:
According to an example embodiment, the present invention is directed to a CMP apparatus having a polishing table, a wafer carrier adapted to carry a wafer on a pad, and a conditioning wheel. If the pad is being polished in a center-fast or center-slow manner, the conditioning wheel is used to condition the pad and to improve the center-fast or center-slow condition. Benefits of using this embodiment include improved wafer quality, improved pad life, a reduction in defective wafers, and faster production.
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