- 专利标题: Web lift system for chemical mechanical planarization
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申请号: US10408032申请日: 2003-04-03
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公开(公告)号: US07008303B2公开(公告)日: 2006-03-07
- 发明人: John M. White , Phillip R. Sommer , Sasson Somekh
- 申请人: John M. White , Phillip R. Sommer , Sasson Somekh
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials Inc.
- 当前专利权人: Applied Materials Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patterson & Sheridan
- 主分类号: B24B1/00
- IPC分类号: B24B1/00 ; B24B7/00
摘要:
Generally, a method and system for lifting a web of polishing material is provided. In one embodiment, the system includes a platen that has a first lift member disposed adjacent to a first side and a second lift member disposed adjacent to a second side. The platen is adapted to support the web of polishing media that is disposed between the first and the second lift members. A method includes supporting a web of polishing media on a platen between a first lift member and a second lift member and moving at least the first lift member or the second lift member to an extended position relative the platen that places the web in a spaced-apart relation with the platen.
公开/授权文献
- US20030171069A1 Web lift system for chemical mechanical planarization 公开/授权日:2003-09-11
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