发明授权
US07008758B2 Method of forming a patterned film of surface-modified carbon nanotubes
有权
形成表面改性碳纳米管的图案化膜的方法
- 专利标题: Method of forming a patterned film of surface-modified carbon nanotubes
- 专利标题(中): 形成表面改性碳纳米管的图案化膜的方法
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申请号: US10713254申请日: 2003-11-17
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公开(公告)号: US07008758B2公开(公告)日: 2006-03-07
- 发明人: Jong Jin Park , Jae Jun Lee , Myung Sup Jung
- 申请人: Jong Jin Park , Jae Jun Lee , Myung Sup Jung
- 申请人地址: KR Gyeonggi-Do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Gyeonggi-Do
- 代理机构: Harness Dickey & Pierce PLC
- 优先权: KR10-2002-0072017 20021119
- 主分类号: G03F7/038
- IPC分类号: G03F7/038 ; G03F7/20 ; G03F7/30
摘要:
Disclosed herein is a method of forming a negative pattern of carbon nanotubes through: modifying the surfaces of carbon nanotubes to have double bond-containing functional group capable of participating in radical polymerization; coating a substrate with a liquid coating composition prepared by dispersing the surface-modified carbon nanotubes in an organic solvent along with a photoinitiator; exposing the film to UV light through a photomask to induce radical polymerization of the carbon nanotubes; and developing the film. By virtue of the present invention, desired patterns of carbon nanotubes can be easily made on the surfaces of various substrates according to the conventional photolithography procedure.
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