发明授权
- 专利标题: Surface acoustic wave device and electronic device using the same
- 专利标题(中): 声表面波装置及使用其的电子装置
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申请号: US10132281申请日: 2002-04-26
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公开(公告)号: US07009468B2公开(公告)日: 2006-03-07
- 发明人: Michio Kadota , Koji Fujimoto , Takeshi Nakao
- 申请人: Michio Kadota , Koji Fujimoto , Takeshi Nakao
- 申请人地址: JP Kyoto
- 专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人地址: JP Kyoto
- 代理机构: Keating & Bennett, LLP
- 优先权: JP2001-132656 20010427
- 主分类号: H03H9/64
- IPC分类号: H03H9/64
摘要:
A small, high-performance SAW device has a large electromechanical coupling coefficient and a small number of fingers constituting reflectors, and is constructed such that losses due to electric resistance of the fingers. In the SAW device having pluralities of first fingers and second fingers, disposed on a quartz substrate, constituting an IDT for exciting SH waves and reflectors for reflecting the SH waves, respectively, the first and second fingers made mainly from Au are disposed on the ST-cut 90° X-propagation quartz substrate with the Euler angles (0°, θ, 90°±2°), wherein the angle θ is within the range of about 110° to about 150° and a normalized film thickness (H/λ) of the fingers is within the range of about 0.003 to about 0.095.