发明授权
- 专利标题： Detecting pinholes in vertical cavity surface-emitting laser passivation
- 专利标题（中）： 在垂直腔表面发射激光钝化中检测针孔
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申请号： US10387621申请日： 2003-03-12
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公开(公告)号： US07011979B2公开(公告)日： 2006-03-14
- 发明人: Gregory N. DeBrabander , Robert W. Herrick , Suning Xie , Matthew C. Slater
- 申请人： Gregory N. DeBrabander , Robert W. Herrick , Suning Xie , Matthew C. Slater
- 主分类号： H01L21/66
- IPC分类号： H01L21/66
摘要：
A method for detecting a passivation pinhole includes forming an oxide vertical cavity surface-emitting laser (VCSEL) having an oxidation cavity, forming a passivation layer over a surface of the oxidation cavity, exposing the oxide VCSEL to an etchant vapor, and inspecting the oxide VCSEL for a defect caused by the etchant vapor.