Invention Grant
US07015489B2 Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm
失效
收集器具有使用波长小于或等于193nm的照明系统的未使用区域
- Patent Title: Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm
- Patent Title (中): 收集器具有使用波长小于或等于193nm的照明系统的未使用区域
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Application No.: US10625254Application Date: 2003-07-23
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Publication No.: US07015489B2Publication Date: 2006-03-21
- Inventor: Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Jochen Wietzorrek , Frank Melzer , Johannes Wangler
- Applicant: Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Jochen Wietzorrek , Frank Melzer , Johannes Wangler
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT AG
- Current Assignee: Carl Zeiss SMT AG
- Current Assignee Address: DE Oberkochen
- Agency: Ohlandt, Greeley, Ruggiero & Perle, L.L.P.
- Priority: DE10102934 20010123; DE10127298 20010606; DE10138313 20010810
- Main IPC: G01G1/00
- IPC: G01G1/00
Abstract:
There is provided a collector for illumination systems for light having a wavelength ≦193 nm comprising. The collector includes (a) a first mirror shell adjacent to, and positioned inside of, a second mirror shell around a common axis of rotation, in which the first and second mirror shells are rotationally symmetric, and (b) a component in a region between the first and second mirror shells. The collector is for receiving the light from a light source via an object-side aperture and for illuminating an area in an image-side plane, and the region is not used by the light.
Public/Granted literature
- US20040065817A1 Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm Public/Granted day:2004-04-08
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