Invention Grant
- Patent Title: Integrated optical device and fabricating method thereof
- Patent Title (中): 集成光学器件及其制造方法
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Application No.: US10792621Application Date: 2004-03-03
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Publication No.: US07016558B2Publication Date: 2006-03-21
- Inventor: Young-Hyun Kim , In Kim , Sang-Moon Lee , Byung-Ok Jeon
- Applicant: Young-Hyun Kim , In Kim , Sang-Moon Lee , Byung-Ok Jeon
- Applicant Address: KR Suwon-Si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-Si
- Agency: Cha & Reiter, L.L.C.
- Priority: KR10-2003-0056181 20030813
- Main IPC: G02B6/12
- IPC: G02B6/12

Abstract:
An integrated optical device having at least two optical devices integrated therein and a method of fabricating the integrated optical device are provided. To fabricate an integrated optical device having optically connected and electrically isolated first and second optical devices on a substrate of a first conductive type, an active layer and a clad layer of a second conductive type are first formed in a mesa structure on the substrate, an SI clad layer is then formed on the substrate surrounding the clad layer of the second conductive type and the active layer, and finally first and second conductive layers are formed into trenches by diffusing a dopant of the second conductive type into the SI clad layer in areas corresponding to the first and second optical devices.
Public/Granted literature
- US20050036729A1 Integrated optical device and fabricating method thereof Public/Granted day:2005-02-17
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