发明授权
US07018729B2 Energy gradient ion beam deposition of carbon overcoats on rigid disk media for magnetic recordings
失效
用于磁记录的刚性盘介质上的碳覆盖层的能量梯度离子束沉积
- 专利标题: Energy gradient ion beam deposition of carbon overcoats on rigid disk media for magnetic recordings
- 专利标题(中): 用于磁记录的刚性盘介质上的碳覆盖层的能量梯度离子束沉积
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申请号: US10611240申请日: 2003-06-30
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公开(公告)号: US07018729B2公开(公告)日: 2006-03-28
- 发明人: Daryl J. Pocker , Jan-Ulrich Thiele , Richard L. White , Bing K. Yen
- 申请人: Daryl J. Pocker , Jan-Ulrich Thiele , Richard L. White , Bing K. Yen
- 申请人地址: NL Amsterdam
- 专利权人: Hitachi Global Storage Technologies Netherlands, B.V.
- 当前专利权人: Hitachi Global Storage Technologies Netherlands, B.V.
- 当前专利权人地址: NL Amsterdam
- 代理机构: Intellectual Property Law Offices
- 代理商 Robert O. Guillot
- 主分类号: G11B5/72
- IPC分类号: G11B5/72
摘要:
The fabrication of the overcoat layer starts with a low energy ion beam to avoid magnetic layer implantation problems, followed by higher deposition energies where the higher energy atoms are implanted into the previously formed lower energy overcoat layer, rather than the magnetic layer. The energy gradient ion beam deposition process therefore results in a thin overcoat layer that is denser than a comparable layer formed by low energy magnetron sputtering, and which overcoat layer provides good mechanical and corrosion protection to the magnetic layer, without degrading the magnetic properties of the magnetic layer.