发明授权
- 专利标题： Inertial sensor
- 专利标题（中）： 惯性传感器
-
申请号： US11091456申请日： 2005-03-29
-
公开(公告)号： US07019231B2公开(公告)日： 2006-03-28
- 发明人: Hiroshi Ishikawa , Yoshitaka Nakamura , Hiroshi Tokunaga , Kenji Nagata
- 申请人： Hiroshi Ishikawa , Yoshitaka Nakamura , Hiroshi Tokunaga , Kenji Nagata
- 申请人地址： JP Yokohama JP Kawasaki
- 专利权人： Fujitsu Media Devices Limited,Fujitsu Limited
- 当前专利权人： Fujitsu Media Devices Limited,Fujitsu Limited
- 当前专利权人地址： JP Yokohama JP Kawasaki
- 代理机构： Arent Fox PLLC
- 优先权： JP2004-099161 20040330
- 主分类号： H01H35/14
- IPC分类号： H01H35/14
摘要：
An inertial sensor includes a sensing portion having a weight supported by beams, the weight being a movable portion, and a weight stopper that limits a movable range of the weight, the weight stopper being arranged in a vicinity of the weight with a given clearance and being a part of a substrate for the inertial sensor processed with MEMS techniques.
公开/授权文献
- US20050217373A1 Inertial sensor 公开/授权日：2005-10-06
信息查询
