- 专利标题: Nonvolatile semiconductor memory and a fabrication method thereof
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申请号: US10868806申请日: 2004-06-17
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公开(公告)号: US07019355B2公开(公告)日: 2006-03-28
- 发明人: Makoto Sakuma , Atsuhiro Sato
- 申请人: Makoto Sakuma , Atsuhiro Sato
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- 优先权: JP2003-342219 20030930
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
A nonvolatile semiconductor memory includes a plurality of memory cell transistors, having floating gates, control gates, and inter-gate insulating films each arranged between corresponding floating gate and corresponding control gate, respectively, and deployed along a column direction; and device isolation regions deployed at a constant pitch along a row direction making a striped pattern along the column direction. The control gates are continuously deployed along the row direction, and the inter-gate insulating films are in series along the column direction and separated from each other at a constant pitch along the row direction.
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