发明授权
- 专利标题: Method for determining wavefront aberrations
- 专利标题(中): 用于确定波前像差的方法
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申请号: US10445076申请日: 2003-05-27
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公开(公告)号: US07019846B2公开(公告)日: 2006-03-28
- 发明人: Wolfgang Emer , Paul Graeupner
- 申请人: Wolfgang Emer , Paul Graeupner
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT AG
- 当前专利权人: Carl Zeiss SMT AG
- 当前专利权人地址: DE Oberkochen
- 代理机构: Sughrue Mion, PLLC
- 优先权: DE10224363 20020524
- 主分类号: G01B9/02
- IPC分类号: G01B9/02
摘要:
In a method for determining wavefront aberrations for the characterization of imaging characteristics in an optical imaging system, the measurement results from two different measurement methods, which are carried out at successive times, are combined. In this case, at least some of the aberration parameters which are determined in the previous first measurement method are used as a given precondition for determining aberration parameters with the aid of the second measurement method, and are assessed accordingly. This results in a hybrid method, in which the strength of at least two measurement methods are used in a combined form, and specific weaknesses of any one method can be avoided.
公开/授权文献
- US20040032579A1 Method for determining wavefront aberrations 公开/授权日:2004-02-19
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