发明授权
- 专利标题： Method and device for observing a specimen in a field of view of an electron microscope
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申请号： US10800872申请日： 2004-03-16
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公开(公告)号： US07022989B2公开(公告)日： 2006-04-04
- 发明人: Hiromi Inada , Isao Nagaoki , Hiroyuki Kobayashi
- 申请人： Hiromi Inada , Isao Nagaoki , Hiroyuki Kobayashi
- 申请人地址： JP Tokyo
- 专利权人： Hitachi, Ltd.
- 当前专利权人： Hitachi, Ltd.
- 当前专利权人地址： JP Tokyo
- 代理机构： Dickstein Shapiro Morin & Oshinsky LLP
- 优先权： JP2000-212961 20000713
- 主分类号： G01N23/00
- IPC分类号： G01N23/00
摘要：
The present invention provides a method of observing a specimen in a field of view of an electron microscope comprising the acts of illuminating the specimen with an electron beam having a first angle and forming a first transmission image of the specimen in the field of view and adjusting the electron beam to a second angle and forming a second transmission image of the specimen in the field of view and calculating a degree of coincidence between the first and second transmission images.