Invention Grant
- Patent Title: Method of manufacturing high-mobility organic thin films using organic vapor phase deposition
- Patent Title (中): 使用有机气相沉积制造高迁移率有机薄膜的方法
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Application No.: US10819658Application Date: 2004-04-06
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Publication No.: US07026187B2Publication Date: 2006-04-11
- Inventor: Max Shtein , Stephen R. Forrest
- Applicant: Max Shtein , Stephen R. Forrest
- Applicant Address: US NJ Princeton
- Assignee: The Trustees of Princeton University
- Current Assignee: The Trustees of Princeton University
- Current Assignee Address: US NJ Princeton
- Agency: Kenyon & Kenyon
- Main IPC: H01L51/40
- IPC: H01L51/40

Abstract:
A method of employing organic vapor phase deposition to fabricate a polycrystalline organic thin film is described. By employing organic vapor phase deposition at moderate deposition chamber pressures and substrate temperatures, a polycrystalline organic thin film results having significantly larger purity and grain size than what is achievable by vacuum thermal evaporation. These polycrystalline organic thin films may be employed in a variety of applications, including, for example, organic light emitting devices, photovoltaic cells, photodetectors, lasers, and thin film transistors.
Public/Granted literature
- US20040191952A1 Method of manufacturing high-mobility organic thin films using organic vapor phase deposition Public/Granted day:2004-09-30
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