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US07026187B2 Method of manufacturing high-mobility organic thin films using organic vapor phase deposition 有权
使用有机气相沉积制造高迁移率有机薄膜的方法

Method of manufacturing high-mobility organic thin films using organic vapor phase deposition
Abstract:
A method of employing organic vapor phase deposition to fabricate a polycrystalline organic thin film is described. By employing organic vapor phase deposition at moderate deposition chamber pressures and substrate temperatures, a polycrystalline organic thin film results having significantly larger purity and grain size than what is achievable by vacuum thermal evaporation. These polycrystalline organic thin films may be employed in a variety of applications, including, for example, organic light emitting devices, photovoltaic cells, photodetectors, lasers, and thin film transistors.
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