发明授权
- 专利标题: Method of fabricating a semiconductor device having a photo-sensitive polyimide layer and a device fabricated in accordance with the method
- 专利标题(中): 制造具有光敏聚酰亚胺层的半导体器件的方法和根据该方法制造的器件
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申请号: US10776064申请日: 2004-02-11
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公开(公告)号: US07026240B2公开(公告)日: 2006-04-11
- 发明人: Jae-Hyun Kim , Dong-Won Shin , Boo-Deuk Kim , Chang-Ho Lee , Won-Mi Kim , Seok-Bong Park
- 申请人: Jae-Hyun Kim , Dong-Won Shin , Boo-Deuk Kim , Chang-Ho Lee , Won-Mi Kim , Seok-Bong Park
- 申请人地址: KR
- 专利权人: Samsung Electronics, Co., Ltd.
- 当前专利权人: Samsung Electronics, Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Mills & Onello, LLP
- 优先权: KR10-2003-0054762 20030807
- 主分类号: H01L21/4763
- IPC分类号: H01L21/4763
摘要:
In a semiconductor device fabrication method and in a product formed according to the method, a photosensitive polyimide layer (PSPL) layer is applied to a semiconductor device in a manner which overcomes the limitations of the conventional approaches. The beneficial qualities of an added photoresist layer are utilized to avoid unwanted development of the underlying PSPL layer. In this manner, cracking of the PSPL layer is mitigated or eliminated, reducing the device soft error rate (SER) and increasing device yield. This is accomplished in a reliable and low-cost approach that employs standard device fabrication techniques.
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