- 专利标题: Manufacture of masks and electronic parts
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申请号: US10405403申请日: 2003-04-02
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公开(公告)号: US07026254B2公开(公告)日: 2006-04-11
- 发明人: Kevin Barry Ray , Anthony Paul Kitson
- 申请人: Kevin Barry Ray , Anthony Paul Kitson
- 申请人地址: US NY Rochester
- 专利权人: Eastman Kodak Company
- 当前专利权人: Eastman Kodak Company
- 当前专利权人地址: US NY Rochester
- 主分类号: H01L21/302
- IPC分类号: H01L21/302
摘要:
A precursor that may be imaged by heat is made up of a substrate, for example a copper board, and a composite layer structure composed of two layers. Preferably, the first layer is composed of an aqueous developable polymer mixture containing a photothermal conversion material, which is contiguous to the substrate. The second layer of the composite is composed of one or more non-aqueous soluble polymers, which are soluble or dispersible in a solvent which does not dissolve the first layer. The precursor is exposed with an infrared laser or a thermal print head, and upon aqueous development, the exposed regions are removed, revealing regions of the substrate surface able to be etched or otherwise treated. The second layer may also contain a photothermal conversion material. Alternatively, the composite layer may be free of photothermal conversion material when thermal imaging is carried out using a thermal print head. The precursor may be used, for example, as a mask precursor or electronic part precursor.
公开/授权文献
- US20030203187A1 Manufacture of masks and electronic parts 公开/授权日:2003-10-30
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