发明授权
US07026649B2 Thin film transistor and active matrix flat panel display using the same
有权
薄膜晶体管和有源矩阵平板显示器使用相同
- 专利标题： Thin film transistor and active matrix flat panel display using the same
- 专利标题（中）： 薄膜晶体管和有源矩阵平板显示器使用相同
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申请号： US10930896申请日： 2004-08-31
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公开(公告)号： US07026649B2公开(公告)日： 2006-04-11
- 发明人: Tae-Wook Kang , Chang-Yong Jeong , Choong-Youl Im
- 申请人： Tae-Wook Kang , Chang-Yong Jeong , Choong-Youl Im
- 申请人地址： KR Suwon-si
- 专利权人： Samsung SDI Co., Ltd.
- 当前专利权人： Samsung SDI Co., Ltd.
- 当前专利权人地址： KR Suwon-si
- 代理机构： Christie, Parker and Hale, LLP
- 优先权： KR10-2003-0061589 20030903
- 主分类号： H01L29/04
- IPC分类号： H01L29/04
摘要：
A thin film transistor and an active matrix flat panel device. By forming a conductive material layer having multiple profiles, critical dimension (CD) bias is reduced and step coverage is enhanced. The thin film transistor includes the conductive material layer formed on an insulating substrate, wherein the conductive material layer is composed of at least one thin film transistor conductive material layer, and an edge portion of the conductive material layer is composed of multiple profiles with multiple edge taper angles.
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