- 专利标题: Optical MEMS switching array with embedded beam-confining channels and method of operating same
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申请号: US09902883申请日: 2001-07-11
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公开(公告)号: US07027682B2公开(公告)日: 2006-04-11
- 发明人: Meichun Ruan , Jun Shen , Charles Wheeler
- 申请人: Meichun Ruan , Jun Shen , Charles Wheeler
- 申请人地址: US AZ Tempe
- 专利权人: Arizona State University
- 当前专利权人: Arizona State University
- 当前专利权人地址: US AZ Tempe
- 代理机构: Quarles & Brady Streich Lang LLP
- 代理商 Robert D. Atkins
- 主分类号: G02B6/35
- IPC分类号: G02B6/35
摘要:
A new optical switch device and method of operating such a device overcomes alignment problems through the use of an optical signal-confining channel that may be embedded so as to confine optical signals in a desired propagation path such that the optical signal's alignment with the output is secured. Small-angle mirrors may be used so as to direct the optical signal into the intended optical signal-confining channels so as to achieve the desired optical switching. The mirrors could be latching micro-mirrors or non-latching micro-mirrors. Such mirrors could be controlled by electrostatic actuation, thermal actuation or electromagnetic actuation, or any other technique.