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US07031584B2 Method for manufacturing optical waveguide using laser direct writing method and optical waveguide manufactured by using the same 失效
使用激光直写法制造光波导的方法和使用该方法制造的光波导

Method for manufacturing optical waveguide using laser direct writing method and optical waveguide manufactured by using the same
Abstract:
A method of manufacturing an optical waveguide using a laser direct writing method is disclosed. More particularly, a method for improving refractive index profile of the optical waveguide by overlapping two or more beams using Gaussian laser beam is provided. In addition, it can accomplish an improved waveguide characteristics such as an offset structure of an S-bend type optical waveguide and an asymmetrical curve optical waveguide by individually adjusting the overlapped laser beams.
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