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US07032451B2 Micromachined sensor with quadrature suppression 有权
具有正交抑制的微加工传感器

Micromachined sensor with quadrature suppression
摘要:
Quadrature suppression is provided by placing a resonator mass adjacent to a quadrature suppression electrode. The resonator mass is capable of moving substantially parallel to the quadrature suppression electrode and includes a notch formed adjacent to a portion of the quadrature suppression electrode such that a length of resonator mass that is directly adjacent to the quadrature suppression electrode varies as the resonator mass moves relative to the quadrature suppression electrode. The quadrature suppression electrode is capable of producing a lateral force on the resonator mass that varies based on the length of resonator mass that is directly adjacent to the quadrature suppression electrode. Such quadrature suppression can be used in sensors having one or more resonator masses.
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