发明授权
- 专利标题: Micromachined sensor with quadrature suppression
- 专利标题(中): 具有正交抑制的微加工传感器
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申请号: US11065878申请日: 2005-02-25
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公开(公告)号: US07032451B2公开(公告)日: 2006-04-25
- 发明人: John A. Geen
- 申请人: John A. Geen
- 申请人地址: US MA Norwood
- 专利权人: Analog Devices, Inc.
- 当前专利权人: Analog Devices, Inc.
- 当前专利权人地址: US MA Norwood
- 代理机构: Bromberg & Sunstein LLP
- 主分类号: G01P9/04
- IPC分类号: G01P9/04
摘要:
Quadrature suppression is provided by placing a resonator mass adjacent to a quadrature suppression electrode. The resonator mass is capable of moving substantially parallel to the quadrature suppression electrode and includes a notch formed adjacent to a portion of the quadrature suppression electrode such that a length of resonator mass that is directly adjacent to the quadrature suppression electrode varies as the resonator mass moves relative to the quadrature suppression electrode. The quadrature suppression electrode is capable of producing a lateral force on the resonator mass that varies based on the length of resonator mass that is directly adjacent to the quadrature suppression electrode. Such quadrature suppression can be used in sensors having one or more resonator masses.
公开/授权文献
- US20050139005A1 Micromachined sensor with quadrature suppression 公开/授权日:2005-06-30
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