发明授权
- 专利标题: Optical component and method of manufacturing the same
- 专利标题(中): 光学部件及其制造方法
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申请号: US10981601申请日: 2004-11-05
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公开(公告)号: US07033855B2公开(公告)日: 2006-04-25
- 发明人: Jun Fujinawa , Junji Nakada
- 申请人: Jun Fujinawa , Junji Nakada
- 申请人地址: JP Kanagawa
- 专利权人: Fuji Photo Film Co., Ltd.
- 当前专利权人: Fuji Photo Film Co., Ltd.
- 当前专利权人地址: JP Kanagawa
- 代理机构: Sughrue Mion, PLLC
- 优先权: JP2001-290990 20010925; JP2001-290991 20010925; JP2001-291271 20010925; JP2001-291467 20010925
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
The optical component includes a substrate made of a resin material, a silicon oxide film formed on a surface of the substrate, and a multilayer light reflection preventing film formed on the silicon oxide film, and having at least one layer of a low-refractive-index material and at least one layer of a high-refractive-index material being alternately formed. The silicon oxide film is thick and/or formed by introducing oxygen during film forming by vacuum deposition so that a preset elasticity is imparted to the silicon oxide film. Other optical component includes a substrate made of a resin material and a plurality of films formed by vacuum deposition, and directions of internal stresses in each adjacent pair of the plurality of films are different from each other or a thickness of an impurity existing on a surface of the substrate is 0.2 nm or less. The plurality of films are formed by performing melting of film forming materials other than a film forming material for a film formed on the surface of the substrate after the film is formed on the surface of the substrate.
公开/授权文献
- US20050064642A1 Optical component and method of manufacturing the same 公开/授权日:2005-03-24
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