Invention Grant
US07034543B2 Method of predicting a lifetime of filament in ion source and ion source device
失效
在离子源和离子源装置中预测长丝寿命的方法
- Patent Title: Method of predicting a lifetime of filament in ion source and ion source device
- Patent Title (中): 在离子源和离子源装置中预测长丝寿命的方法
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Application No.: US10712344Application Date: 2003-11-14
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Publication No.: US07034543B2Publication Date: 2006-04-25
- Inventor: Koji Iwasawa
- Applicant: Koji Iwasawa
- Applicant Address: JP Kyoto
- Assignee: Nissin Electric Co., Ltd.
- Current Assignee: Nissin Electric Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JPP2002-330634 20021114
- Main IPC: G01R31/08
- IPC: G01R31/08
Abstract:
An ion source device includes an ion source having a filament for emitting thermoelectrons, a current measuring device for measuring current flowing through the filament, a voltage measuring device for measuring voltage across the filament, a resistance operation device for computing a resistance value of the filament by using the current and the voltage measured by the current and voltage measuring devices, and a prediction operation device for computing a time till the application limits of the filament or a time left till the application limits of the filament.
Public/Granted literature
- US20040149927A1 Method of predicting a lifetime of filament in ion source and ion source device Public/Granted day:2004-08-05
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