发明授权
- 专利标题： Very high sensitivity magnetic sensor
- 专利标题（中）： 非常高灵敏度的磁传感器
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申请号： US10149093申请日： 2000-12-06
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公开(公告)号： US07038285B2公开(公告)日： 2006-05-02
- 发明人: Hervé Jaouen , Thomas Skotnicki , Malgorzata Jurczak
- 申请人： Hervé Jaouen , Thomas Skotnicki , Malgorzata Jurczak
- 申请人地址： FR Montrouge
- 专利权人： STMicroelectronics SA
- 当前专利权人： STMicroelectronics SA
- 当前专利权人地址： FR Montrouge
- 代理机构： Allen, Dyer, Doppelt, Milbrath & Gilchrist, P.A.
- 代理商 Lisa K. Jorgenson
- 优先权： FR9915410 19991207
- 国际申请： PCT/FR00/03407 WO 20001206
- 国际公布： WO01/42805 WO 20010614
- 主分类号： H01L29/82
- IPC分类号： H01L29/82
摘要：
A magnetic sensor includes a thin deformable membrane made of a conductive material forming a first plate of a capacitor which conducts an electric current therethrough. A second capacitor plate of the capacitor includes a doped region of a semiconductor substrate. A layer of a gaseous dielectric separates the two plates. The membrane deforms due to the effect of the Lorentz force generated by a magnetic field lying in the plane of the membrane and perpendicular to the lines of current being conducted therethrough. In addition, a process for fabricating this magnetic sensor is also provided as well as a device for measuring a magnetic field using the magnetic sensor.
公开/授权文献
- US20030076095A1 Very high sensitivity magnetic sensor 公开/授权日：2003-04-24
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