Invention Grant
US07041983B2 Planar geometry buried junction infrared detector and focal plane array
失效
平面几何掩埋结红外探测器和焦平面阵列
- Patent Title: Planar geometry buried junction infrared detector and focal plane array
- Patent Title (中): 平面几何掩埋结红外探测器和焦平面阵列
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Application No.: US09976559Application Date: 2001-10-12
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Publication No.: US07041983B2Publication Date: 2006-05-09
- Inventor: Pradip Mitra
- Applicant: Pradip Mitra
- Applicant Address: US MD Bethesda
- Assignee: Lockheed Martin Corporation
- Current Assignee: Lockheed Martin Corporation
- Current Assignee Address: US MD Bethesda
- Agent Daren C. Davis; James E. Walton
- Main IPC: G01T1/24
- IPC: G01T1/24

Abstract:
The described embodiments of the present invention include a method for forming a radiation detector. A radiation absorption layer is formed on a substrate. A wider bandgap layer is formed on the radiation absorption layer. A passivation layer is formed on the wider bandgap layer. A doping layer is formed on the passivation layer. The doping layer is then patterned and dopant is driven from the patterned doping layer into the junction layer and the radiation absorption layer to form a doped region. The passivation layer is patterned to expose the doped region and an electrical contact to the doped region is formed.
Public/Granted literature
- US20030071221A1 Planar geometry buried junction infrared detector and focal plane array Public/Granted day:2003-04-17
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