- 专利标题: Semiconductor device and method for manufacturing the same
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申请号: US10762470申请日: 2004-01-23
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公开(公告)号: US07042040B2公开(公告)日: 2006-05-09
- 发明人: Fumio Horiguchi
- 申请人: Fumio Horiguchi
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- 优先权: JP2000-275336 20000911
- 主分类号: H01L27/108
- IPC分类号: H01L27/108
摘要:
A semiconductor memory device comprises select transistors formed on side surfaces of plural silicon columns defined by a grid-like trenches on a surface of a silicon substrate, each select transistor having a source and a drain on the top surface and the bottom of the silicon column. A capacitor is formed on the top surface of the silicon column to form a DRAM cell. The source/drain layers on the bottom of a greater number of memory cells are commonly connected, or the source/drain layers on the bottom of adjacent memory cells are commonly connected, to be brought out to the surface of the silicon substrate by a connection line to be connected to a constant voltage or a bit line.
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