Invention Grant
- Patent Title: Scanning electron microscope
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Application No.: US11016849Application Date: 2004-12-21
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Publication No.: US07049591B2Publication Date: 2006-05-23
- Inventor: Hideo Todokoro , Makoto Ezumi , Yoichi Ose , Naomasa Suzuki
- Applicant: Hideo Todokoro , Makoto Ezumi , Yoichi Ose , Naomasa Suzuki
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Dickstein Shapiro Morin & Oshinsky LLP
- Main IPC: H01J37/20
- IPC: H01J37/20

Abstract:
A scanning electron microscope with an energy filter which can positively utilize secondary electrons and/or reflected electrons which collide against a mesh electrode and are lost. The scanning electron microscope which has a porous electrode for producing an electric field for energy-filtering electrons produced by applying a primary electron beam to a sample and a 1st electron detector which detects electrons passing through the porous electrode is characterized by further having a porous structure provided near the sample, a deflector which deflects electrons from the axis of the primary electron beam, and a 2nd electron detector which detects the electrons deflected by the deflector.
Public/Granted literature
- US20050133719A1 Scanning electron microscope Public/Granted day:2005-06-23
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