发明授权
- 专利标题: Misalignment-tolerant electronic interfaces and methods for producing misalignment-tolerant electronic interfaces
- 专利标题(中): 用于产生不对准电子接口的不对准电子接口和方法
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申请号: US10817698申请日: 2004-04-02
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公开(公告)号: US07049626B1公开(公告)日: 2006-05-23
- 发明人: Yong Chen
- 申请人: Yong Chen
- 申请人地址: US TX Houston
- 专利权人: Hewlett-Packard Development Company, L.P.
- 当前专利权人: Hewlett-Packard Development Company, L.P.
- 当前专利权人地址: US TX Houston
- 主分类号: H01L29/06
- IPC分类号: H01L29/06
摘要:
A nanoscale or partial nanoscale interface within an electronic device, and a method for producing such interfaces without the need for precise nanoscale alignment of nanoscale elements of a first circuit layer to elements of a second circuit layer, is disclosed. In one embodiment, dimensions of conductive windows fabricated on microelectronic elements are carefully specified, and redundant nanoscale elements are introduced, in order to produce functional nanoscale-to-microscale interfaces despite imprecise nanoscale alignment of nanoscale elements to microscale elements.
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