发明授权
- 专利标题: SONOS type memory device
- 专利标题(中): SONOS型存储设备
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申请号: US11070090申请日: 2005-03-03
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公开(公告)号: US07053448B2公开(公告)日: 2006-05-30
- 发明人: Sang-hun Jeon , Chung-woo Kim , Dong-joon Ma , Sung-kyu Choi
- 申请人: Sang-hun Jeon , Chung-woo Kim , Dong-joon Ma , Sung-kyu Choi
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Lee & Morse, P.C.
- 优先权: KR10-2004-0017998 20040317
- 主分类号: H01L29/792
- IPC分类号: H01L29/792
摘要:
A SONOS type memory includes a semiconductor substrate, first and second impurity regions in the semiconductor substrate doped with impurity ions of a predetermined conductivity, separated a predetermined distance from each other, a channel region between the first and second impurity regions, and a data storage type stack on the semiconductor substrate between the first and second impurity regions. The data storage type stack includes a tunneling oxide layer, a memory node layer for storing data, a blocking oxide layer, and an electrode layer, which are sequentially formed. A dielectric constant of the memory node layer is higher than dielectric constants of the tunneling and the blocking oxide layers, and a band offset of the memory node layer is lower than band offsets of the tunneling and the blocking oxide layers. The tunneling oxide layer and the blocking oxide layer are high dielectric insulating layers.
公开/授权文献
- US20050205920A1 SONOS type memory device 公开/授权日:2005-09-22
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