发明授权
- 专利标题： Piezoelectric structure, liquid ejecting head and manufacturing method therefor
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申请号： US10071095申请日： 2002-02-11
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公开(公告)号： US07053526B2公开(公告)日： 2006-05-30
- 发明人: Akira Unno , Takao Yonehara , Tetsuro Fukui , Takanori Matsuda , Kiyotaka Wasa
- 申请人： Akira Unno , Takao Yonehara , Tetsuro Fukui , Takanori Matsuda , Kiyotaka Wasa
- 申请人地址： JP Tokyo JP Nara
- 专利权人： Canon Kabushiki Kaisha,Kiyotaka Wasa
- 当前专利权人： Canon Kabushiki Kaisha,Kiyotaka Wasa
- 当前专利权人地址： JP Tokyo JP Nara
- 代理机构： Fitzpatrick, Cella, Harper & Scinto
- 优先权： JP2001-033823 20010209
- 主分类号： H01L41/08
- IPC分类号： H01L41/08
摘要：
A piezoelectric structure includes a vibrational plate; a piezoelectric film; the vibrational plate including a layer of a monocrystal material, a polycrystal material, a monocrystal material doped with an element which is different from an element constituting the monocrystal material, or a polycrystal material doped with an element which is different from an element constituting the polycrystal materials, and oxide layers sandwiching the aforementioned layer, the piezoelectric film has a single orientation crystal or monocrystal structure.