Invention Grant
US07056872B2 Solution composition for removing a remaining photoresist resin
失效
用于除去剩余的光致抗蚀剂树脂的溶液组合物
- Patent Title: Solution composition for removing a remaining photoresist resin
- Patent Title (中): 用于除去剩余的光致抗蚀剂树脂的溶液组合物
-
Application No.: US10252467Application Date: 2002-09-23
-
Publication No.: US07056872B2Publication Date: 2006-06-06
- Inventor: Geun Su Lee , Jae Chang Chung , Ki Soo Shin , Kee Joon Oh
- Applicant: Geun Su Lee , Jae Chang Chung , Ki Soo Shin , Kee Joon Oh
- Applicant Address: KR Kyoungki-Do
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Kyoungki-Do
- Agency: Marshall, Gerstein & Borun LLP
- Priority: KR2001-58602 20010921
- Main IPC: C23G1/02
- IPC: C23G1/02

Abstract:
Cleaning solutions for removing photoresist resins remaining on the underlying layer patterns formed by photolithography process using the photoresist patterns as etching mask. The cleaning solution for removing photoresist comprises H2O as solvent, amine compounds, hydrazine hydrate, transition metal-removing material and alkali metal-removing material. Photoresist coated on the top portion of underlying layers can be rapidly and effectively removed by the disclosed cleaning solution. In addition, the cleaning solution is environment-friendly because H2O is used as the solvent, and has little effect on metal layers when underlying layers are formed of metals.
Public/Granted literature
- US20030060382A1 Solution composition for removing a remaining photoresist resin Public/Granted day:2003-03-27
Information query