- 专利标题: Silicon-based visible and near-infrared optoelectric devices
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申请号: US10950230申请日: 2004-09-24
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公开(公告)号: US07057256B2公开(公告)日: 2006-06-06
- 发明人: James Edward Carey, III , Eric Mazur
- 申请人: James Edward Carey, III , Eric Mazur
- 申请人地址: US MA Cambridge
- 专利权人: President & Fellows of Harvard College
- 当前专利权人: President & Fellows of Harvard College
- 当前专利权人地址: US MA Cambridge
- 代理机构: Nutter McClennen & Fish LLP
- 代理商 Thomas J. Engellenner; Reza Mollaaghababa
- 主分类号: H01L31/06
- IPC分类号: H01L31/06
摘要:
In one aspect, the present invention provides a silicon photodetector having a surface layer that is doped with sulfur inclusions with an average concentration in a range of about 0.5 atom percent to about 1.5 atom percent. The surface layer forms a diode junction with an underlying portion of the substrate. A plurality of electrical contacts allow application of a reverse bias voltage to the junction in order to facilitate generation of an electrical signal, e.g., a photocurrent, in response to irradiation of the surface layer. The photodetector exhibits a responsivity greater than about 1 A/W for incident wavelengths in a range of about 250 nm to about 1050 nm, and a responsivity greater than about 0.1 A/W for longer wavelengths, e.g., up to about 3.5 microns.