发明授权
- 专利标题： Substrate heater and fabrication method for the same
- 专利标题（中）： 基板加热器及其制造方法相同
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申请号： US10945269申请日： 2004-09-20
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公开(公告)号： US07060945B2公开(公告)日： 2006-06-13
- 发明人: Nobuyuki Kondou , Hideyoshi Tsuruta
- 申请人： Nobuyuki Kondou , Hideyoshi Tsuruta
- 申请人地址： JP Nagoya
- 专利权人： NGK Insulators, Ltd.
- 当前专利权人： NGK Insulators, Ltd.
- 当前专利权人地址： JP Nagoya
- 代理机构： Burr & Brown
- 优先权： JPP2003-340920 20030930
- 主分类号： H05B3/68
- IPC分类号： H05B3/68
摘要：
A substrate heater is provided including a plate-shaped ceramic base having a first side defining a convex heating surface on at least a portion of which a substrate is placed, a resistance-heating element embedded in the ceramic base, and a tubular member joined to a central portion on an opposed second side of the ceramic base. The convex heating surface has a central portion and a peripheral portion, wherein the height of the heating surface decreases from the central portion toward the peripheral portion thereof.
公开/授权文献
- US20050082274A1 Substrate heater and fabrication method for the same 公开/授权日：2005-04-21