发明授权
US07061591B2 Maskless lithography systems and methods utilizing spatial light modulator arrays
失效
无掩模光刻系统和利用空间光调制器阵列的方法
- 专利标题: Maskless lithography systems and methods utilizing spatial light modulator arrays
- 专利标题(中): 无掩模光刻系统和利用空间光调制器阵列的方法
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申请号: US10449908申请日: 2003-05-30
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公开(公告)号: US07061591B2公开(公告)日: 2006-06-13
- 发明人: Arno Bleeker , Wenceslao A. Cebuhar , Jason D. Hintersteiner
- 申请人: Arno Bleeker , Wenceslao A. Cebuhar , Jason D. Hintersteiner
- 申请人地址: NL Veldhoven
- 专利权人: ASML Holding N.V.
- 当前专利权人: ASML Holding N.V.
- 当前专利权人地址: NL Veldhoven
- 代理机构: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- 主分类号: G03B27/32
- IPC分类号: G03B27/32 ; G03B27/72 ; G03C5/00
摘要:
A maskless lithography system that writes patterns on an object. The system can include an illumination system, the object, spatial light modulators (SLMs), and a controller. The SLMs can pattern light from the illumination system before the object receives the light. The SLMs can include a leading set and a trailing set of the SLMs. The SLMs in the leading and trailing sets change based on a scanning direction of the object. The controller can transmit control signals to the SLMs based on at least one of light pulse period information, physical layout information about the SLMs, and scanning speed of the object. The system can also correct for dose non-uniformity using various methods.
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