- 专利标题: Semiconductor device having shared contact and fabrication method thereof
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申请号: US11143194申请日: 2005-06-01
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公开(公告)号: US07064026B2公开(公告)日: 2006-06-20
- 发明人: Do-Hyung Kim , Jung-In Hong
- 申请人: Do-Hyung Kim , Jung-In Hong
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Marger Johnson & McCollom, P.C
- 优先权: KR2001-35703 20010622
- 主分类号: H01L21/8238
- IPC分类号: H01L21/8238
摘要:
Semiconductor devices and methods of fabrication. A device includes a semiconductor substrate, a gate electrode insulated from the semiconductor substrate by a gate insulation layer, LDD-type source/drain regions formed at both sides of the gate electrode, an interlayer insulation layer formed over the gate electrode and the substrate, and a shared contact piercing the interlayer insulation layer and contacting the gate electrode and one of the LDD-type source/drain regions including at least a part of a lightly doped drain region. Multiple-layer spacers are formed on both sides of the gate structure and used as a mask in forming the LDD-type regions. At least one layer of the spacer is removed in the contact opening to widen the opening to receive a contact plug.
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