发明授权
US07064083B2 Hexakis(monohydrocarbylamino)disilanes and method for the preparation thereof
有权
六烷基（单烃基氨基）二硅烷及其制备方法
- 专利标题： Hexakis(monohydrocarbylamino)disilanes and method for the preparation thereof
- 专利标题（中）： 六烷基（单烃基氨基）二硅烷及其制备方法
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申请号： US11222361申请日： 2005-09-08
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公开(公告)号： US07064083B2公开(公告)日： 2006-06-20
- 发明人: Christian Dussarrat , Jean-Marc Girard
- 申请人： Christian Dussarrat , Jean-Marc Girard
- 申请人地址： FR Paris
- 专利权人： L'Air Liquide, Societe Anonyme a Directoire et Conseil de Surveillance pour l'Etude et l'Exploitation des Procedes Georges Claude
- 当前专利权人： L'Air Liquide, Societe Anonyme a Directoire et Conseil de Surveillance pour l'Etude et l'Exploitation des Procedes Georges Claude
- 当前专利权人地址： FR Paris
- 代理商 Linda K. Russell
- 优先权： JP2001-367123 20011130
- 主分类号： H01L21/31
- IPC分类号： H01L21/31
摘要：
A composition and method of preparation, to provide silane compounds that are free of chlorine. The compounds are hexakis(monohydrocarbylamino)disilanes with general formula (I) ((R)HN)3—Si—Si—(NH(R))3 (I) wherein each R independently represents a C1 to C4 hydrocarbyl. These disilanes may be synthesized by reacting hexachlorodisilane in organic solvent with at least 6-fold moles of the monohydrocarbylamine RNH2 (wherein R is a C1 to C4 hydrocarbyl). Such compounds have excellent film-forming characteristics at low temperatures. These films, particularly in the case of silicon nitride and silicon oxynitride, also have excellent handling characteristics.
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