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US07066191B2 Installation for making available highly pure fine chemicals 失效
安装提供高纯度精细化学品

Installation for making available highly pure fine chemicals
Abstract:
A system and method for providing process chemicals. The system includes a housing comprising a functional component positioned in a first compartment, a control module positioned in a second compartment and at least one connecting line positioned in a third compartment. At least one compartment is positioned in a defined location in the housing. Modules may be removable received in their respective compartments.
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