发明授权
- 专利标题： Film forming apparatus and method of driving same, device manufacturing method, device manufacturing apparatus, and device
- 专利标题（中）： 成膜装置及其驱动方法，装置制造方法，装置制造装置及装置
-
申请号： US10660467申请日： 2003-09-11
-
公开(公告)号： US07066583B2公开(公告)日： 2006-06-27
- 发明人: Takahiro Usui
- 申请人： Takahiro Usui
- 申请人地址： JP
- 专利权人： Seiko Epson Corporation
- 当前专利权人： Seiko Epson Corporation
- 当前专利权人地址： JP
- 代理机构： Harness, Dickey & Pierce, P.L.C.
- 优先权： JP2003-266975 20020912; JP2003-206587 20030807
- 主分类号： B41J2/45
- IPC分类号： B41J2/45
摘要：
A film forming apparatus and a method of driving this apparatus control vibrations imparted to a liquid by a discharge waveform (a first signal) that causes liquid drops to be discharged and by a micro vibration waveform (a second signal) that does not cause liquid drops to be discharged and that also imparts a shear rate to the liquid that lowers the viscosity of the liquid.
公开/授权文献
信息查询
IPC分类:
